Nanoanalysis of a sub-nanometre reaction layer in a metal inserted high-k gate stack

Reactions at the interfaces can occur in metal inserted high-k gate stacks and are likely to evolve during device processing. Such reactions may affect the electrical properties of the stack and hence these could change during processing. The key interfaces are often not atomically flat and characterising the reaction layers on the near atomic scale required is a challenge. Aberration corrected scanning transmission electron microscopy (STEM) and spectrum imaging (SI) using electron energy loss spectroscopy (EELS) is used to characterise an HfN or Hf(O,N) reaction layer, ∼0.25 nm wide, between HfO<sub>2</sub> and TiN. This demonstrates the very significant advances in high spatial resolution characterisation made in recent years

Characterisation of InAs/GaAs short period superlattices using column ratio mapping in aberration-corrected scanning transmission electron microscopy

The image processing technique of columnratiomapping was applied to aberration-corrected high angle annular dark field (HAADF) images of shortperiod MBE (molecular beam epitaxy) grown InAs/GaAssuperlattices. This method allowed the Indium distribution to be mapped and a more detailed assessment of interfacial quality to be made. Frozen-phonon multislice simulations were also employed to provide a better understanding of the experimental columnratio values. It was established that ultra-thin InAs/GaAs layers can be grown sufficiently well by MBE. This is despite the fact that the Indium segregated over 3–4 monolayers. Furthermore, the effect of the growth temperature on the quality of the layers was also investigated. It was demonstrated that the higher growth temperature resulted in a better quality superlattice structure

Modelling of AlAs/GaAs interfacial structures using high-angle annular dark field (HAADF) image simulations

High angle annular dark field (HAADF) image simulations were performed on a series of AlAs/GaAsinterfacial models using the frozen-phonon multislice method. Three general types of models were considered—perfect, vicinal/sawtooth and diffusion. These were chosen to demonstrate how HAADFimage measurements are influenced by different interfacialstructures in the technologically important III–V semiconductor system. For each model, interfacial sharpness was calculated as a function of depth and compared to aberration-corrected HAADF experiments of two types of AlAs/GaAs interfaces. The results show that the sharpness measured from HAADF imaging changes in a complicated manner with thickness for complex interfacialstructures. For vicinal structures, it was revealed that the type of material that the probe projects through first of all has a significant effect on the measured sharpness. An increase in the vicinal angle was also shown to generate a wider interface in the random step model. The Moison diffusion model produced an increase in the interface width with depth which closely matched the experimental results of the AlAs-on-GaAs interface. In contrast, the interface width decreased as a function of depth in the linear diffusion model. Only in the case of the perfect model was it possible to ascertain the underlying structure directly from HAADFimage analysis

Quantitative electron energy-loss spectroscopy (EELS) analyses of lead zirconate titanate

Electron energy-loss spectroscopy (EELS) analyses have been performed on a sol–gel deposited lead zirconate titanate film, showing that EELS can be used for heavy as well as light element analysis. The elemental distributions within the sol–gel layers are profiled using the Pb N<sub>6,7</sub>-edges, Zr M-edges, Ti L-edges and O K-edge. A multiple linear least squares fitting procedure was used to extract the Zr signal which overlaps with the Pb signal. Excellent qualitative information has been obtained on the distribution of the four elements. The non-uniform and complementary distributions of Ti and Zr within each sol–gel deposited layer are observed. The metal:oxygen elemental ratios are quantified using experimental standards of PbTiO<sub>3</sub>, PbZrO<sub>3</sub>, ZrO<sub>2</sub> and TiO<sub>2</sub> to provide relevant cross-section ratios. The quantitative results obtained for Ti/O and Pb/O are very good but the Zr/O results are less accurate. Methods of further improving the results are discussed

Security policy refinement using data integration: a position paper.

In spite of the wide adoption of policy-based approaches for security management, and many existing treatments of policy verification and analysis, relatively little attention has been paid to policy refinement: the problem of deriving lower-level, runnable policies from higher-level policies, policy goals, and specifications. In this paper we present our initial ideas on this task, using and adapting concepts from data integration. We take a view of policies as governing the performance of an action on a target by a subject, possibly with certain conditions. Transformation rules are applied to these components of a policy in a structured way, in order to translate the policy into more refined terms; the transformation rules we use are similar to those of global-as-view database schema mappings, or to extensions thereof. We illustrate our ideas with an example. Copyright 2009 ACM

Logical properties of nonmonotonic causal theories and the action language C+

The formalism of nonmonotonic causal theories (Giunchiglia, Lee, Lifschitz, McCain, Turner, 2004) provides a general-purpose formalism for nonmonotonic reasoning and knowledge representation, as well as a higher level, special-purpose notation, the action language C+, for specifying and reasoning about the e ects of actions and the persistence (`inertia') of facts over time. In this paper we investigate some logical properties of these formalisms. There are two motivations. From the technical point of view, we seek to gain additional insights into the properties of the languages when viewed as a species of conditional logic. From the practical point of view, we are seeking to nd conditions under which two di erent causal theories, or two di erent action descriptions in C+, can be said to be equivalent, with the further aim of helping to decide between alternative formulations when constructing practical applications. A condensed version of this paper appeared as `Some logical properties of nonmonotonic causal theories', Proc. Eighth International Conference on Logic Programming and Non-Monotonic Reasoning, LNCS, Springer

A study of secondary winding designs for the two-coil Tesla transformer

The multi-order response of the tuned secondary circuit of a Tesla transformer, following impulse excitation from its tuned primary circuit, is presented and analysed at the fundamental resonant frequency and at higher-order mode frequencies. A novel way of modifying the frequency response of the secondary coil is then investigated by utilising a technique normally applied to the design of a certain type of filter known as a helical filter. In general, these are used in radio and microwave frequency circuits in order to pass certain frequencies with little attenuation whilst significantly attenuating other frequencies. Design techniques, developed over several decades, modify and optimise the performance of such filters. The frequency response of the helical filter is modified by altering the geometry of the helical resonator component therein, which is typically in the form of an air-cored single-layer solenoid. A Tesla transformer whose secondary is constructed to be some form of single-layer solenoidal winding resonates at its designed frequency - its fundamental mode - but also at non-integer harmonics (higher-order anharmonic frequencies, also known as overtones). Those multi-order oscillatory voltages and currents energised in the secondary circuit have been identified and measured and research has determined the fundamental and higher-order mode frequencies and amplitudes for various experimental secondary winding configurations derived from helical filter design techniques. Applied to the Tesla transformer secondary winding, such techniques lead to a new design with a performance that is improved by the suppression of higher- order anharmonic frequencies whilst imparting little change to the fundamental response. It is anticipated that this feature will lead to Tesla transformers which exhibit enhanced spectral purity and which will be better suited to use in certain pulsed power applications than conventionally wound designs

Sample preparation for nanoanalytical electron microscopy using the FIB lift-out method and low energy ion milling

Thinning specimens to electron transparency for electron microscopy analysis can be done by conventional (2 - 4 kV) argon ion milling or focused ion beam (FIB) lift-out techniques. Both these methods tend to leave ''mottling'' visible on thin specimen areas, and this is believed to be surface damage caused by ion implantation and amorphisation. A low energy (250 - 500 V) Argon ion polish has been shown to greatly improve specimen quality for crystalline silicon samples. Here we investigate the preparation of technologically important materials for nanoanalysis using conventional and lift-out methods followed by a low energy polish in a GentleMill™ low energy ion mill. We use a low energy, low angle (6 - 8°) ion beam to remove the surface damage from previous processing steps. We assess this method for the preparation of technologically important materials, such as steel, silicon and GaAs. For these materials the ability to create specimens from specific sites, and to be able to image and analyse these specimens with the full resolution and sensitivity of the STEM, allows a significant increase of the power and flexibility of nanoanalytical electron microscopy